James F. Groves
"Directed Vapor Deposition"
Ph.D. Dissertation, University of Virginia, 1998.
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Abstract
Quote
Acknowledgements
List of Figures
List of Tables
List of Symbols
Table of Contents
Chapter 1
Introduction
- Vapor Phase Synthesis of Materials
- Applications Motivating Vapor Phase Process Development
- Goals of the Dissertation
Chapter 2
Background
- Vapor Creation Using an Electron Beam Gun
- Vapor Transport
- Vapor Adsorption and Diffusion on a Substrate
- Summary
Chapter 3
Invention of Directed Vapor Deposition
Chapter 4
DVD System Design
- Electron Beam Gun
- Processing Chamber
- Crucible
- Gas System
- Vacuum Pumps
- Vacuum Gauges
- Substrate Temperature Control System
- Computer Control Methodology
- Concluding Remark
Chapter 5
Experimental Investigation of Vapor Transport
- Overview
- Available Processing Regime
- Visual Observations of Gas Stream
- Gas Flow / Vapor Stream / Substrate Interactions
- Concluding Remarks
Chapter 6
Materials Synthesis Via Directed Vapor Deposition
- Overview
- Contamination Study of Nonreactive Deposition
- Study of Silicon Deposition
- Study of Reactive Deposition
- Concluding Remarks
Chapter 7
Experimental Investigations of Deposition Efficiency
- Overview
- Deposition Efficiency Experimental Procedures
- Flat Substrate Results
- Fiber Substrate
- Clustering
- Summary
Chapter 8
Vapor Transport Model Development
- Direct Simulation Monte Carlo (DSMC) Modeling of the Flowfield
- Bimolecular Collision Theory (BCT) Modeling of Vapor Transport
- Summary
Chapter 9
Vapor Transport Model Verification
- Verification of DSMC Results
- BCT Model Verification
- Summary
Chapter 10
Vapor Transport Modeling of DVD
- Vapor Transport Predictions
- Vapor Deposition Predictions
- Summary
Chapter 11
DVD System Development
- Reconfiguration of the Gun, Vapor Source, and Carrier Gas Flow
- Substrate Bias
- Impact of Changes in Vapor Flux Upon Carrier Gas Flow
- Experimental Work
- Model Development
- Concluding Remarks
Chapter 12
Discussion
- Focus, Efficiency, and Angular Distribution
- Non-line-of-sight Coating
- Vapor Stream Mixing
- Enhanced Energy Deposition
- Rapid, Continuous Processing of Pure Materials and Compounds
- Other Applications
- Other System Configurations
- Summary
Chapter 13
Conclusions
- Specific Conclusions
- Final Thought
References
Appendix A
DVD Specifications
- E-beam Gun Design Drawings
- Processing Chamber Design Drawings
- Water-Cooled Crucible Design Drawings
- Processing Chamber Pumping Capacity Design Calculations
Appendix B
Clustering Calculations
Appendix C
Flowfield Modeling Code
Appendix D
Atom Tracking Code
Appendix E
E-beam Vapor Distribution