IPM_Title Ipm_v
 

Wei Zou

"Synthesis of Giant Magnetoresistive Multilayers"

Ph.D. Dissertation, University of Virginia, 2001.

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Abstract

Acknowledgements

Table of Contents

Chapter 1
Introduction

  • Giant Magnetoresistance Multilayers
  • Goals of the Dissertation
  • Organization

Chapter 2
Magnetoelectronics

  • Magnetoresistance
  • Experimental Observations of GMR Phenomenon
  • GMR Mechanisms
  • Materials and Structures
  • GMR Devices Applications
    • GMR Sensors
    • GMR Nonvolatile Memories
  • Summary of Critical Issues

Chapter 3
Vapor Deposition of Metal Multilayers

  • Classes of Deposition Process
  • DC Diode Sputtering
  • RF Diode Sputtering
  • Magnetron Sputtering
  • Ion Beam Sputtering
  • Biased Target Ion Beam Assisted Deposition
  • Summary

Chapter 4
Deposition Experiments

  • Sputtering Deposition Equipment
  • Experimental Procedures
  • Experimental Results
    • Background Pressure Effects
    • Input Power Effect
  • The Dependence of Surface Morphology upon Deposition Conditions
  • Summary

Chapter 5
Multiscale Deposition Modeling

  • Plasma Model
    • Plasma State
    • Sheaths
    • RF Discharge
    • Implementation
    • Plasma Model Results
      • Background Pressure Effect
      • Input Power Effect
    • Discussion
  • Sputter Model
    • Sputtering Mechanisms
    • Energetic Particles in Sputtering Process
      • Sputter Yield of Copper
      • Energy Distribution of the Sputtered Copper Atoms
      • Angular Distribution of the Sputtered Copper Atoms
    • Sputter Model Implementation
    • Sputter Model Results
      • Background Pressure Effect
      • Input Power Effect
    • Discussion
  • Vapor Transport Model
    • Modeling the Flow Field
    • Direct Simulation Monte Carlo (DSMC) Modeling
    • Distance Between Collisions
    • Calculation of the Directed Momentum Transfer Cross-section
    • Collision Event
    • Vapor Transport Model Results
      • Background Pressure Effect
      • Input Power Effect
    • Discussion
  • Summary

Chapter 6
Process Optimization

  • Fluxes and Energies
  • Monte Carlo Simulations
  • Influence of Intermixing on GMR Properties
  • Discussion
  • Summary

Chapter 7
Spacer Composition Effects

  • The Dependence of Magnetotransport Properties Upon NFM Conducting Layer Composition
  • The Dependence of Surface Morphology Upon Layer Composition
  • Summary

Chapter 8
Interrupted Deposition Experiments

  • Surface Morphology of the Initial Growth Step
  • Surface Morphology of Layer Stacks
  • Discussion
  • Summary

Chapter 9
Molecular Dynamics Studies of Spacer Alloying Effects

  • Interatomic Potential
  • Alloy Models with the Embedded-Atom Method
  • Molecular Dynamics Model
    • Cu and Cu80Ag15Au5 Single Layer Deposition
    • Multilayer Deposition
  • Surface Alloy Kinetic Effects
  • Binary Alloy Systems
  • Cu-Ag-Au Ternary Alloy system
  • Hillocks Formation
  • Discussion
  • Summary

Chapter 10
Discussion

  • Interface Structure Control by Process Modification
    • Adatom Kinetic Energy Effect
    • Effect of Ar+ Ion Bombardment
  • Interface Structure Control Via Surfactants
  • Defect Effects
  • Latent Heat of Condensation

Chapter 11
Conclusions

References

Appendix A
Plasma Model

Appendix B
Multiscale Deposition Model Code

Appendix C
Surface Analysis

Appendix D
Estimates of Surface Kinetic Effects

 

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