Yang - The Monte Carlo Simulation of Physical Vapor Deposition

Yougen Yang

"The Monte Carlo Simulation of Physical Vapor Deposition"

This thesis develops a comprehensive kinetic Monte Carlo model which is capable of simulating the atom by atom assembly of thin films deposited on flat and featured surfaces.

Ph.D. Dissertation, University of Virginia, 2000.

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Abstract, Acknowledgement, Table of Contents
Chapter 1 - Introduction
Chapter 2 - Historical Perspective
Chapter 3 - Kinetic Monte Carlo Modeling
Chapter 4 - Implementation of kMC Algorithm and Verification
Chapter 5 - Low Energy Physical Vapor Deposition
Chapter 6 - Multilayer Deposition
Chapter 7 - Energy-dependent Mechanisms
Chapter 8 - Hyperthermal Physical Vapor Deposition
Chapter 9 - Trench Filling by Physical Vapor Deposition
Chapter 10 - Discussion
Chapter 11 - Future Directions
Chapter 12 - Conclusions
References and Appendices